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High Spatial Resolution and Wide Range EDS Analysis with FE-SEM

Published online by Cambridge University Press:  04 August 2017

Shuichi Takeuchi
Affiliation:
Application Development Dept., Hitachi High-Technologies Corp., Kawasaki, Japan
Yoichiro Hashimoto
Affiliation:
Application Development Dept., Hitachi High-Technologies Corp., Kawasaki, Japan
Masahiro Sasajima
Affiliation:
Electron Microscope Systems Design 1st Dept., Hitachi High-Technologies Corp., Hitachinaka, Japan
Kotaro Hosoya
Affiliation:
Electron Microscope Systems Design 1st Dept., Hitachi High-Technologies Corp., Hitachinaka, Japan
Yukari Dan
Affiliation:
Application Development Dept., Hitachi High-Technologies Corp., Kawasaki, Japan
Shintaro Miyasaka
Affiliation:
Horiba Ltd., Chiyoda, Japan
Susumu Yamaguchi
Affiliation:
Oxford Instruments KK, Shinagawa, Japan

Abstract

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Type
Abstract
Copyright
© Microscopy Society of America 2017 

References

[1] Li Xiaobing, , et al, Microsc. Microanal 19(Suppl 2 2013). p. 11361137.Google Scholar
[2] Simon Burgess, , et al, Microsc. Microanal 22(Suppl 3 2016). p. 112113.Google Scholar