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High Performance in Low Voltage HR-STEM Applications Enabled By Fast Automatic Tuning of the Combination of a Monochromator and Probe Cs-Corrector

Published online by Cambridge University Press:  25 July 2016

Sorin Lazar
Affiliation:
FEI Company, P.O. Box 80066, KA 5600 Eindhoven, The Netherlands
Peter Tiemeijer
Affiliation:
FEI Company, P.O. Box 80066, KA 5600 Eindhoven, The Netherlands
Sander Henstra
Affiliation:
FEI Company, P.O. Box 80066, KA 5600 Eindhoven, The Netherlands
Terry Dennemans
Affiliation:
FEI Company, P.O. Box 80066, KA 5600 Eindhoven, The Netherlands
Jan Ringnalda
Affiliation:
FEI Company, P.O. Box 80066, KA 5600 Eindhoven, The Netherlands
Bert Freitag
Affiliation:
FEI Company, P.O. Box 80066, KA 5600 Eindhoven, The Netherlands

Abstract

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Type
Abstract
Copyright
© Microscopy Society of America 2016 

References

References:

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