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Helium ions for nano-engineering

Published online by Cambridge University Press:  23 November 2012

E. van Veldhoven  and
D. Maas
E. van Veldhoven
Affiliation:
Nano instrumentation, TNO, Delft, Netherlands
D. Maas
Affiliation:
Nano instrumentation, TNO, Delft, Netherlands
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Abstract

Extended abstract of a paper presented at Microscopy and Microanalysis 2012 in Phoenix, Arizona, USA, July 29 – August 2, 2012.

Type
Research Article
Information
Microscopy and Microanalysis , Volume 18 , Issue S2: Proceedings of Microscopy & Microanalysis 2012 , July 2012 , pp. 794 - 795
Copyright
Copyright © Microscopy Society of America 2012

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