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Ga+ FIB Milling and Measurement of FIB Damage in Sapphire

Published online by Cambridge University Press:  27 August 2014

Brandon Van Leer ,
Huikai Cheng  and
Jessica Riesterer
Brandon Van Leer
Affiliation:
FEI Company, 5350 NW Dawson Creek Drive, Hillsboro, OR 97124, USA
Huikai Cheng
Affiliation:
FEI Company, 5350 NW Dawson Creek Drive, Hillsboro, OR 97124, USA
Jessica Riesterer
Affiliation:
FEI Company, 5350 NW Dawson Creek Drive, Hillsboro, OR 97124, USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 346 - 347
Copyright
Copyright © Microscopy Society of America 2014 

References

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[2] Giannuzzi, , et al., Microsc Microanal 11(Suppl 2) (2005).Google Scholar
[3] Ziegler, JF & Biersack, JP SRIM (2003). www.SRIM.com.Google Scholar