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Further Applications of Energy Filtered TEM in Semiconductor Devices

Published online by Cambridge University Press:  01 August 2002

Lancy Tsung ,
Adolfo Anciso  and
Jan Ringnalda
Lancy Tsung
Affiliation:
Texas Instruments, Semiconductor Group, Kilby Analysis Lab, Dallas, TX 75243
Adolfo Anciso
Affiliation:
Texas Instruments, Semiconductor Group, Kilby Analysis Lab, Dallas, TX 75243
Jan Ringnalda
Affiliation:
FEI Company, 7451 NW Evergreen Parkway, Hillsboro OR 97124

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 8 , Issue S02 , August 2002 , pp. 626 - 627
Copyright
Copyright © Microscopy Society of America 2002