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From the Scanning Electron Microscope to the Scanning Electron Macroscope with X-Ray Microanalysis in the ESEM

Published online by Cambridge University Press:  02 July 2020

Raynald Gauvin
Raynald Gauvin*
Affiliation:
Département de génie mécanique, Université de Sherbrooke, Sherbrooke, Québec, CanadaJ1K 2R1.
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Extract

Recently, a new correction procedure has been proposed in order to perform X-Ray microanalysis in the ESEM or in the VP-SEM1. This new correction procedure is based on this equation:

where I is the measured intensity at a given pressure P, Ip is the intensity that would be generated without any gas in the microscope (the corrected intensity) and Im is the intensity with complete scattering of the electron beam. Im is therefore the contribution of the skirt on I. In equation (1), fp is the fraction of the incident beam, which is not scattered by the gas above the specimen, and it can be obtained from Monte Carlo simulations or from an analytical equation.

Type
Working with ESEM and Other Variable Pressure Systems
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 792 - 793
Copyright
Copyright © Microscopy Society of America

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References

References:

1.Gauvin, R. (1999) “ Some Theoretical Considerations on X-Ray Microanalysis in the Environmental or Variable Pressure Scanning Electron Microscope”, Scanning, Vol. 21, 6, pp. 388–393.Google Scholar