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Focused Ne+ Ion Beams for Final Polishing of TEM Lamella Prepared Through Ga-FIB Systems

Published online by Cambridge University Press:  23 September 2015

Doug Wei ,
Chuong Huynh  and
Alexander Ribbe
Doug Wei
Affiliation:
Ion Microscopy Innovation Center, Carl Zeiss Microscopy, LLC. Peabody, Massachusetts, USA
Chuong Huynh
Affiliation:
Ion Microscopy Innovation Center, Carl Zeiss Microscopy, LLC. Peabody, Massachusetts, USA
Alexander Ribbe
Affiliation:
Polymer Science and Engineering, University of Massachusetts, Amherst, Massachusetts, USA

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1409 - 1410
Copyright
Copyright © Microscopy Society of America 2015 

References

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