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The Focused Ion Beam Hard Mask Mechanism

Published online by Cambridge University Press:  08 April 2017

W McKenzie  and
P Munroe
W McKenzie
Affiliation:
University of New South Wales, Australia
P Munroe
Affiliation:
University of New South Wales, Australia

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 17 , Supplement S2 , July 2011 , pp. 684 - 685
Copyright
Copyright © Microscopy Society of America 2011