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The Focused Ion Beam Hard Mask: Insights into the Mechanism and a New Application for Photonic Structures

Published online by Cambridge University Press:  01 August 2010

W McKenzie ,
M Hiscocks ,
F Ladouceur  and
P Munroe
W McKenzie
Affiliation:
University of New South Wales, Australia
M Hiscocks
Affiliation:
University of New South Wales, Australia
F Ladouceur
Affiliation:
University of New South Wales, Australia
P Munroe
Affiliation:
University of New South Wales, Australia

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 196 - 197
Copyright
Copyright © Microscopy Society of America 2010