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Exploring the Differences in Spatial Resolution between Auger and EDS Elemental Mapping

Published online by Cambridge University Press:  01 August 2018

Casey R. Thurber*
Affiliation:
Honeywell, Kansas City, MO, USA

Abstract

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Type
Abstract
Copyright
© Microscopy Society of America 2018 

References

[1] Briggs, D Grant, JT Surface Analysis by Auger and X-Ray Photoelectron Spectroscopy, (IM Publications and Surface Spectra Limited, UK) (p. 5758.Google Scholar
[2] Raman, SN, et al, Microsc. Microanal. 16(S2 2010) p. 354355.Google Scholar
[3] Friel, JJ, et al, X-ray and Image Analysis in Electron Microscopy, (Bruker Nano GmbH, Berlin) (p. 1024.Google Scholar