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Experiments in Astigmatism Detection and Correction Techniques for the SEM

Published online by Cambridge University Press:  30 July 2020

Richard Roebuck ,
Bernard Breton ,
David Holburn  and
Nicholas Caldwell
Richard Roebuck
Affiliation:
BT plc, Ipswich, England, United Kingdom
Bernard Breton
Affiliation:
University of Cambridge, Cambridge, England, United Kingdom
David Holburn
Affiliation:
University of Cambridge, Cambridge, England, United Kingdom
Nicholas Caldwell
Affiliation:
University of Suffolk, Ipswich, England, United Kingdom

Abstract

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Type
Advances in Modeling, Simulation, and Artificial Intelligence in Microscopy and Microanalysis for Physical and Biological Systems
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 2124 - 2125
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Copyright
Copyright © Microscopy Society of America 2020

References

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Lu, Y., Zhang, X., and Li, H.. (2018). A simplified focusing and astigmatism correction method for a scanning electron microscope. AIP Advances, [online] 8(1), p.015124.10.1063/1.5009683CrossRefGoogle Scholar
Erasmus, S.J. and Smith, K.C.A. (1982). An automatic focusing and astigmatism correction system for the SEM and CTEM. Journal of Microscopy, 127(2), pp. 185–19910.1111/j.1365-2818.1982.tb00412.xCrossRefGoogle Scholar
Batten, C.F. (2000). Autofocusing and Astigmatism Correction in the Scanning Electron Microscope, MPhil Thesis, University of CambridgeGoogle Scholar
Caldwell, N.H.M. et al. , Microsc. Microanal. 19 (Suppl S2) (2013), p. 77410.1017/S1431927613005862CrossRefGoogle Scholar
SmartSEM™ is a trademark of Carl Zeiss Microscopy. This research was supported by funding from Carl Zeiss Microscopy and the in-kind support of the first author by BT plc. The authors gratefully acknowledge the assistance of Carl Zeiss personnel in undertaking this research.Google Scholar