Imaging of sample regions with a thickness significantly larger than the extinction length and strong thickness variations introduces two major problems for transmission electron microscopy (TEM) : (i) inelastic scattering increases the energy width of the transmitted electrons and therefore the resolution decreases (ii) the contrast differences caused by thickness variations can be higher than the dynamic range of the detector system.

Both problems can be solved by using energy filtering techniques. The advantage here is that for energy filtered imaging the resolution limit is not determined by the sample thickness but by the width of the energy selection aperture. Fig. 1 shows three envelope functions of the temporal coherence calculated for different values of the energy width. The functions were plotted for an acceleration voltage of 200 kV and a high voltage stability of 2 ppm.