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Energy-Filtered Transmission Electron Microscope Tomography of Silicon Nanoparticles in Silicon Dioxide Deposited with High Density Plasma Chemical Vapor Deposition

Published online by Cambridge University Press:  27 August 2014

T. Brintlinger ,
M. E. Twigg  and
H. L. Hughes
T. Brintlinger
Affiliation:
Material Science and Technology Division, U. S. Naval Research Laboratory, Washington, DC
M. E. Twigg
Affiliation:
Electronics Science and Technology Division, U. S. Naval Research Laboratory, Washington, DC
H. L. Hughes
Affiliation:
Material Science and Technology Division, U. S. Naval Research Laboratory, Washington, DC

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 810 - 811
Copyright
Copyright © Microscopy Society of America 2014 

References

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[8] Work at the Naval Research Laboratory was funded through the Office of Naval Research.Google Scholar