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Energy-Filtered Transmission Electron Microscope Tomography of Silicon Nanoparticles in Silicon Dioxide Deposited with High Density Plasma Chemical Vapor Deposition
Published online by Cambridge University Press: 27 August 2014
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- Microscopy and Microanalysis , Volume 20 , Supplement S3: Proceedings of Microscopy & Microanalysis 2014 , August 2014 , pp. 810 - 811
- Copyright
- Copyright © Microscopy Society of America 2014
References
[2]
Müller, T, Heinig, KH, Möller, W Materials Science and Engineering: B 101 (2003), p. 49-54.Google Scholar
[8] Work at the Naval Research Laboratory was funded through the Office of Naval Research.Google Scholar
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