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Energy-Filtered Imaging and Spectrum Imaging: Which One Should I Choose?
Published online by Cambridge University Press: 02 July 2020
Extract
There are now several commercially available methods for performing spatially resolved electron energy-loss spectroscopy in a transmission electron microscopy. In the energy-filtering electron microscope (EFEM), an Omega filter (Zeiss 912) or a post-column magnetic-prism filter (Gatan Imaging Filter) forms an electron image with electrons of a selected energy loss. A series of such images are acquired to provide spatially resolved information on sections of the energy-loss spectrum. These images can be processed to yield elemental maps from areas of interest in the material. In the spectrum imaging method (EMISPEC System), a small focused electron probe is rastered over the sample and a parallel energy-loss spectrum acquired from each point in the selected area. These spectra are then batch processed and information like elemental distributions extracted and displayed in the form of a map. Each of these two approaches has advantages and disadvantages and the appropriate choice is often dictated by factors such as time constraints, sample stability and the nature of the information of interest.
- Type
- Analytical Electron Microscopy
- Information
- Microscopy and Microanalysis , Volume 3 , Issue S2: Proceedings: Microscopy & Microanalysis '97, Microscopy Society of America 55th Annual Meeting, Microbeam Analysis Society 31st Annual Meeting, Histochemical Society 48th Annual Meeting, Cleveland, Ohio, August 10-14, 1997 , August 1997 , pp. 949 - 950
- Copyright
- Copyright © Microscopy Society of America 1997