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Energy filtered imaging in a FEG-SEM for enhanced dopant contrast

Published online by Cambridge University Press:  01 August 2002

C. Schönjahn
Affiliation:
Department of Materials Science and Metallurgy, University of Cambridge, Pembroke Street, Cambridge CB2 3QZ, UK
C.J. Humphreys
Affiliation:
Department of Materials Science and Metallurgy, University of Cambridge, Pembroke Street, Cambridge CB2 3QZ, UK
M. Glick
Affiliation:
Marconi Labs, Gates Building, JJ Thomson Ave, Cambridge CB3 0FD, UK

Abstract

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Abstract
Copyright
Copyright © Microscopy Society of America 2002