Hostname: page-component-77c89778f8-vsgnj Total loading time: 0 Render date: 2024-07-18T12:23:09.687Z Has data issue: false hasContentIssue false
  • English
  • Français

Energy Analyzer Attachments for the Scanning Electron Microscope

Published online by Cambridge University Press:  28 September 2015

A. Khursheed
A. Khursheed*
Affiliation:
Department of Electrical and Computer Engineering, National University of Singapore, Singapore.

Abstract

An abstract is not available for this content so a preview has been provided. As you have access to this content, a full PDF is available via the ‘Save PDF’ action button.
Image of the first page of this content. For PDF version, please use the ‘Save PDF’ preceeding this image.'
Type
Energy Spectrometers
Information
Microscopy and Microanalysis , Volume 21 , Supplement S4: Proceedings Ninth International Conference on Charged Particle Optics , June 2015 , pp. 130 - 135
Copyright
Copyright © Microscopy Society of America 2015 

References

References:

[1]Khursheed, A in “Scanning Electron Microscope Optics and Spectrometers“, (World Sci.) ch. 5.Google Scholar
[2]Thong, JTL in “Electron Beam Testing Technology“, (Plenum Press) ch. 5.Google Scholar
[3]Kazemain, P, et al, J. Appl. Phys 100 (2006). p 054901.CrossRefGoogle Scholar
[4]Rau, E, et al, Rev. Sci. Instrum 73 (2002). p 227.CrossRefGoogle Scholar
[5]El-Gomati, MM, Walker, CG & Zha, X, Nucl. Instrum. Meth A 645 (2011). p 68.Google Scholar
[6]Luo, T & Khursheed, A, IEEE T. Device Mat. Res 6 (2006). p 182.CrossRefGoogle Scholar
[7]Cazaux, J, J. Electron Micros 61 (2012). p 277.CrossRefGoogle Scholar
[8]Feuerbaum, HP, Scan. Electron Micros I (1979). p 465.Google Scholar
[9]Khursheed, A & Dinnis, AR, Scanning 6 (1984). p 85.CrossRefGoogle Scholar
[10]Gopanath, A, J. Phys. E. Sci. Instrum 4 (1977). p 334.CrossRefGoogle Scholar
[11]Khursheed, A & Hoang, HQ, Ultramicroscopy 109 (2008). p 104.CrossRefGoogle Scholar
[12]Hoang, HQ & Khursheed, A, J. Vac. Sci. Technol B 27 (2009). p 3226.CrossRefGoogle Scholar
[13]Hoang, HQ, Osterberg, M & Khursheed, A, Ultramicroscopy 111 (2011). p 1093.CrossRefGoogle Scholar
[14] LORENTZ-2EM, Integrated Engineering Software Inc., Canada.Google Scholar
[15]Srinivasan, A PhD thesis, National University of Singapore, expected to be available in early 2015..Google Scholar
[16] The authors acknowledge funding under the Singapore Government MOE 2011-T2-2-108 grant.Google Scholar