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Electron Irradiation Cleaning of the SEM and its Samples

Published online by Cambridge University Press:  30 July 2021

Andras Vladar
Affiliation:
Natl. Inst. of Standards and Technology, Gaithersburg, Maryland, United States
David Hoyle
Affiliation:
Self employed, n/a, Canada
Hosoya Kotaro
Affiliation:
Hitachi HTA, United States

Abstract

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Type
Advances in Focused Ion Beam Instrumentation, Applications and Techniques in and Materials and Life Sciences
Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Active monitoring and control of electron-beam-induced contamination, 2001, Vladár, A. E., et al. https://doi.org/10.1117/12.436724CrossRefGoogle Scholar
The Scanning Electron Microscope Contamination Assessment Reference Sample (SEMCARS) is available for free through a cooperation with NIST, contact the author at Google Scholar
Sparkle EC of Hitachi High-Technologies Canada, Inc. https://www.hitachi-hightech.com/ca/Google Scholar
Contamination Mitigation Strategy for Ultra-Low Energy Electron Microscopy and Spectroscopy, 2019, Mikmeková, E. M. et al. https://doi.org/10.1017/S1431927619003234Google Scholar
Electron irradiation induced amorphous SiO2 formation at metal oxide/Si interface at room temperature; electron beam writing on interfaces, 2018, Gurbán, S., et al. https://doi.org/10.1038/s41598-018-20537-4Google Scholar