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Electron Irradiation Cleaning of the SEM and its Samples

Published online by Cambridge University Press:  30 July 2021

Andras Vladar
Natl. Inst. of Standards and Technology, Gaithersburg, Maryland, United States
David Hoyle
Self employed, n/a, Canada
Hosoya Kotaro
Hitachi HTA, United States


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Advances in Focused Ion Beam Instrumentation, Applications and Techniques in and Materials and Life Sciences
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America


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The Scanning Electron Microscope Contamination Assessment Reference Sample (SEMCARS) is available for free through a cooperation with NIST, contact the author at Google Scholar
Sparkle EC of Hitachi High-Technologies Canada, Inc. Scholar
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Electron irradiation induced amorphous SiO2 formation at metal oxide/Si interface at room temperature; electron beam writing on interfaces, 2018, Gurbán, S., et al. Scholar