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Effects of Fast Secondary Electrons on Spatiallyresolved Low-Loss Eels of Polystyrene

Published online by Cambridge University Press:  02 July 2020

K. Siangchaew  and
M. Libera
K. Siangchaew
Affiliation:
Dept. of Materials Science and Engineering, Stevens Institute of Technology, Hoboken, NJ, 07030
M. Libera
Affiliation:
Dept. of Materials Science and Engineering, Stevens Institute of Technology, Hoboken, NJ, 07030
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A good understanding of the effect of electron irradiation on polymers is necessary in order to optimally utilize the spectroscopic information and resolution of spatially-resolved electron energy-loss spectroscopy (EELS). This investigation studies the effect of electron irradiation on the low-loss spectroscopic signal and spatial resolution obtainable from polystyrene (PS) homopolymer. Because of the conjugated valence electron distribution associated with its pendant phenyl ring, polystyrene is relatively stable under electron irradiation and has well characterized spectroscopic fingerprints including a notable π—π* transition circa 7eV (1). In addition, polystyrene is used as a positive photoresist because it can cross-link effectively when exposed to an electron irradiation (2).

The critical dose characterizing degradation of aromatic polymers is of the order 1-10 C/cm2 (3). In practice, the dose delivered to a specimen is determined both by electron probe size and probe current.

Type
Developments in Measuring Polymer Microstructures
Information
Microscopy and Microanalysis , Volume 4 , Issue S2: Proceedings: Microscopy & Microanalysis '98, Microscopy Society of America 56th Annual Meeting, Microbeam Analysis Society 32nd Annual Meeting, Atlanta, Georgia July 12-16, 1998 , July 1998 , pp. 804 - 805
Copyright
Copyright © Microscopy Society of America

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References

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