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Effective Method for Decreasing Detection Limit of Dopant Concentration in Semiconductor Using Dual SDD Analysis System
Published online by Cambridge University Press: 25 July 2016
Abstract
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- Type
- Abstract
- Information
- Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 316 - 317
- Copyright
- © Microscopy Society of America 2016
References
[3]
Egerton, R.F. “Electron Energy-Loss Spectroscopy in the Electron Microscope”, 3rd edition, p. 197.Google Scholar