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The Effect of the Ion Beam Energy on M-plane InGaN Layer Preparation for STEM

Published online by Cambridge University Press:  05 August 2019

Trang Nguyen ,
Brandon Dzuba ,
Yang Cao ,
Alexander Senichev ,
Rosa Diaz ,
Geoffrey Gardner ,
Michael Manfra  and
Oana Malis
Trang Nguyen
Affiliation:
Department of Physics and Astronomy, Purdue University, West Lafayette, IN, USA.
Brandon Dzuba
Affiliation:
Department of Physics and Astronomy, Purdue University, West Lafayette, IN, USA.
Yang Cao
Affiliation:
Department of Physics and Astronomy, Purdue University, West Lafayette, IN, USA.
Alexander Senichev
Affiliation:
Birck Nanotechnology Center, West Lafayette, IN, USA.
Rosa Diaz
Affiliation:
Birck Nanotechnology Center, West Lafayette, IN, USA.
Geoffrey Gardner
Affiliation:
Birck Nanotechnology Center, West Lafayette, IN, USA.
Michael Manfra
Affiliation:
Department of Physics and Astronomy, Purdue University, West Lafayette, IN, USA. Birck Nanotechnology Center, West Lafayette, IN, USA. School of Electrical and Computer Engineering, Purdue University, West Lafayette, IN, USA. School of Materials Engineering, Purdue University, West Lafayette, IN, USA.
Oana Malis
Affiliation:
Department of Physics and Astronomy, Purdue University, West Lafayette, IN, USA.

Abstract

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Type
Revealing the Fundamental Structure of Soft and Hard Matter by Minimizing Beam-Sample Interactions
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 1702 - 1703
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Jiménez, J.J. et al. , Journal of Alloys and Compounds, 783 (2019), p. 697.Google Scholar
[2]Prabakaran, K. et al. , Applied Surface Science, 476 (2019), p. 993.Google Scholar
[3]Nanishi, Y. et al. , Phys. Stat. Sol. (a), 200 (2003), p. 202.Google Scholar
[4]Wang, X.. (2018), Characterization of InGaN thin Films and Nanowires by Analytical Transmission Electron Microscopy (Doctoral dissertation). Retrieved from http://etheses.whiterose.ac.uk/21255/.Google Scholar
[5]Nguyen, T. et al. , Phys. Stat. Sol. (a), 215 (2018), p. 1700828.Google Scholar
[6]T. Nguyen, Y. Cao, B. Dzuba, A. Senichev, O. Malis, and M. Manfra acknowledge funding from the National Science Foundation. TN, YC, and OM acknowledge partial support from NSF grant ECCS-1253720, and DMR-1610893. AS and BD were supported from NSF award ECCS-1607173.Google Scholar