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Diagnosis of Magnification Stability and Non-Linearity in SEMs

Published online by Cambridge University Press:  02 July 2020

A. Sicignano ,
D. Eremin  and
A. V. Nikitin
A. Sicignano
Affiliation:
Nanometrology LLC, Ardsley Park Science and Technology Center, Ardsley, New York
D. Eremin
Affiliation:
Nanometrology LLC, Ardsley Park Science and Technology Center, Ardsley, New York
A. V. Nikitin
Affiliation:
Nanometrology LLC, Ardsley Park Science and Technology Center, Ardsley, New York
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Summary: In recent years the SEM has advanced from an instrument used primarily for imaging to a tool for performing precise and accurate measurements of features. The SEM has been widely adapted by workers in diverse technical fields such as: integrated circuit (IC) processing, micro electro-mechanical devices (MEMs) design and molecular biology research. The SEM user in need of acquiring accurate dimensional information about their samples normally relies on the magnification readings and settings provided by the instrument maker. Tools to evaluate the precision of these physical dimensions or to assist in understanding the state of the SEM are not currently available. This paper presents a new methodology based on novel software and hardware to provide the user with capability of diagnosing the magnification stability and non-linearity of their SEMs prior to attempting accurate and precise feature measurements. Examples will be presented demonstrating the diagnosis of magnification stability and non-linearity in SEMs located at 4 independent sites.

Type
Instrument Performance
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 1132 - 1133
Copyright
Copyright © Microscopy Society of America

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References

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