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Development of the Scanning Atom Probe and Atomic Level Analysis

Published online by Cambridge University Press:  02 July 2020

Osamu Nishikawa ,
Takahiro Sekine ,
Yoshikatsu Ohtani ,
Kiyoshi Maeda ,
Yoshihiro Numada ,
Masafuirni Watanabe ,
Masashi Iwatsuki ,
Susumu Aoki ,
Junji Itoh  and
Kazushi Yamanaka
Osamu Nishikawa
Affiliation:
Dept, of Materials Sciences and Engineering, Kanazawa Institute of Technology 7-1 Ohgigaoka, Nonoichi, Kanazawa-South 921 Japan Phone & FAX: +81-762-94-6717 E-mail: nisikawa@neptune.kanazawa-it.ac.jp
Takahiro Sekine
Affiliation:
Dept, of Materials Sciences and Engineering, Kanazawa Institute of Technology 7-1 Ohgigaoka, Nonoichi, Kanazawa-South 921 Japan Phone & FAX: +81-762-94-6717 E-mail: nisikawa@neptune.kanazawa-it.ac.jp
Yoshikatsu Ohtani
Affiliation:
Dept, of Materials Sciences and Engineering, Kanazawa Institute of Technology 7-1 Ohgigaoka, Nonoichi, Kanazawa-South 921 Japan Phone & FAX: +81-762-94-6717 E-mail: nisikawa@neptune.kanazawa-it.ac.jp
Kiyoshi Maeda
Affiliation:
Dept, of Materials Sciences and Engineering, Kanazawa Institute of Technology 7-1 Ohgigaoka, Nonoichi, Kanazawa-South 921 Japan Phone & FAX: +81-762-94-6717 E-mail: nisikawa@neptune.kanazawa-it.ac.jp
Yoshihiro Numada
Affiliation:
Dept, of Materials Sciences and Engineering, Kanazawa Institute of Technology 7-1 Ohgigaoka, Nonoichi, Kanazawa-South 921 Japan Phone & FAX: +81-762-94-6717 E-mail: nisikawa@neptune.kanazawa-it.ac.jp
Masafuirni Watanabe
Affiliation:
Dept, of Materials Sciences and Engineering, Kanazawa Institute of Technology 7-1 Ohgigaoka, Nonoichi, Kanazawa-South 921 Japan Phone & FAX: +81-762-94-6717 E-mail: nisikawa@neptune.kanazawa-it.ac.jp
Masashi Iwatsuki
Affiliation:
Research & Development Department, Electron Optics Div. JEOL Ltd., 1-2 Musashino 3-chome, Akishima, Tokyo, 196, Japan
Susumu Aoki
Affiliation:
Research & Development Department, Electron Optics Div. JEOL Ltd., 1-2 Musashino 3-chome, Akishima, Tokyo, 196, Japan
Junji Itoh
Affiliation:
Electrotechnical Lab., 1-1-4 Umezono, Tsukuba, 305, Japan
Kazushi Yamanaka
Affiliation:
Dept. of Materials Processing, Graduate School of Engineering, Tohoku University Aramaki, Aoba-ku, Sendai 980-77 Japan
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Extract

The analyzing area of a conventional atom probe is an apex of a long, sharp tip. However, the fabrication of such a filamentary tip is extraordinary difficult for most materials, such as organic materials, ceramics and semiconductors with multi-layer structures. Accordingly, the application of the atom probe are severely restricted In order to overcome this difficulty, Nishikawa proposed to develop a scanning atom probe (SAP) introducing a funnel-shaped microextraction electrode to the conventional AP in order to confine the high field into a small space between a tip apex and an open end of the electrode. Thus, the SAP allows to analyze not only an apex of a sharp slender tip but also an apex of a few micron high minute cusp which normally exists on an unsmoothened specimen surface.

The microextraction electrode scans over a rugged specimen surface at a bias voltage and stands still right above an apex of a micro cusp, FIG. 1.

Type
Imaging and Analysis at the Atomic Level: 30 Years of Atom Probe Field Ion Microscopy
Information
Microscopy and Microanalysis , Volume 4 , Issue S2: Proceedings: Microscopy & Microanalysis '98, Microscopy Society of America 56th Annual Meeting, Microbeam Analysis Society 32nd Annual Meeting, Atlanta, Georgia July 12-16, 1998 , July 1998 , pp. 82 - 83
Copyright
Copyright © Microscopy Society of America

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References

1.Nishikawa, O. and Kimoto, M.: Appl. Surf. Sci., 76/77 (1994) 424.CrossRefGoogle Scholar
2.Nishikawa, O., Kimoto, M., Iwatsuki, M. and Ishikawa, Y.: J. Vac. Sci. Technol. B, 13 (1995) 599.CrossRefGoogle Scholar
3.Nishikawa, O., Iwatsuki, M., Aoki, S. and Ishikawa, Y.: J. Vac. Sci. Technol. B, 14(1996) 2110.CrossRefGoogle Scholar
4.Nishikawa, O., et al. : J. Vac. Sci. Technol. B, March/April (1998).Google Scholar
5.Nishikawa, O., etal. : to be published in Appl. Phys. B (1998).Google Scholar
6. The authors would like to thank Mr. Masaaki Yanagisawa of Showa Denko Co. Ltd for supplying diamond samples. This research was supported by the Ministry of Education and by the Proposal- Based New Industry Creative Type Technology R&D Promotion Program of New Energy and Industrial Technology Development Organization (NEDO) of Japan.Google Scholar