Hostname: page-component-76fb5796d-45l2p Total loading time: 0 Render date: 2024-04-26T01:26:11.069Z Has data issue: false hasContentIssue false
  • English
  • Français

Development of Novel Thin Film Deposition Methods in a CrossBeam® FIB-SEM Platform Using an OmniGISTM

Published online by Cambridge University Press:  03 August 2008

EL Principe ,
C Hartfield ,
R Kruger  and
A Smith
EL Principe
Affiliation:
Carl Zeiss SMT Inc
C Hartfield
Affiliation:
OmniProbe
R Kruger
Affiliation:
Carl Zeiss SMT Inc
A Smith
Affiliation:
OmniProbe
Get access

Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2008 in Albuquerque, New Mexico, USA, August 3 – August 7, 2008

Type
Research Article
Information
Microscopy and Microanalysis , Volume 14 , Supplement S2 , August 2008 , pp. 990 - 991
Copyright
© 2008 Microscopy Society of America

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)