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Development of Electron Optics System for "ETHOS" High-Performance FIB-SEM

Published online by Cambridge University Press:  01 August 2018

Shunsuke Sato
Affiliation:
Science System Product Div., Hitachi High-Technologies corp., Hitachinaka-shi, Japan.
Chisato Kamiya
Affiliation:
Science System Product Div., Hitachi High-Technologies corp., Hitachinaka-shi, Japan.
Ryo Hirano
Affiliation:
Science System Product Div., Hitachi High-Technologies corp., Hitachinaka-shi, Japan.
Tsunenori Nomaguchi
Affiliation:
Science System Product Div., Hitachi High-Technologies corp., Hitachinaka-shi, Japan.
Akinari Morikawa
Affiliation:
Science System Product Div., Hitachi High-Technologies corp., Hitachinaka-shi, Japan.
Hiroyuki Suzuki
Affiliation:
Beam Technology Engineering Dep., Hitachi High-Technology Science corp., Oyama-cho, Japan.
Hidekazu Suzuki
Affiliation:
Beam Technology Engineering Dep., Hitachi High-Technology Science corp., Oyama-cho, Japan.
Yo Yamamoto
Affiliation:
Beam Technology Engineering Dep., Hitachi High-Technology Science corp., Oyama-cho, Japan.
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© Microscopy Society of America 2018 
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