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Development of Clustering Algorithm Applied for the EELS Analysis of Advanced Devices

Published online by Cambridge University Press:  30 July 2020

Mu-Tuhg Chang
Affiliation:
Industrial Technology Research Institute, Chutung, Hsinchu, Taiwan (Republic of China)
Ren-Fong Cai
Affiliation:
Industrial Technology Research Institute, Hsinchu, Hsinchu, Taiwan (Republic of China)
Chien-Chun Chen
Affiliation:
Department of Engineering and System Science, National Tsing Hua University, Hsinchu, Taiwan, Hsinchu, Hsinchu, Taiwan (Republic of China)
Shen-Chuan Lo
Affiliation:
Industrial Technology Research Institute, Chutung, Hsinchu, Taiwan (Republic of China)

Abstract

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Type
Advances in Modeling, Simulation, and Artificial Intelligence in Microscopy and Microanalysis for Physical and Biological Systems
Copyright
Copyright © Microscopy Society of America 2020

References

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