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Development of Clustering Algorithm Applied for the EELS Analysis of Advanced Devices

Published online by Cambridge University Press:  30 July 2020

Mu-Tuhg Chang ,
Ren-Fong Cai ,
Chien-Chun Chen  and
Shen-Chuan Lo
Mu-Tuhg Chang
Affiliation:
Industrial Technology Research Institute, Chutung, Hsinchu, Taiwan (Republic of China)
Ren-Fong Cai
Affiliation:
Industrial Technology Research Institute, Hsinchu, Hsinchu, Taiwan (Republic of China)
Chien-Chun Chen
Affiliation:
Department of Engineering and System Science, National Tsing Hua University, Hsinchu, Taiwan, Hsinchu, Hsinchu, Taiwan (Republic of China)
Shen-Chuan Lo
Affiliation:
Industrial Technology Research Institute, Chutung, Hsinchu, Taiwan (Republic of China)

Abstract

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Type
Advances in Modeling, Simulation, and Artificial Intelligence in Microscopy and Microanalysis for Physical and Biological Systems
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 2112 - 2114
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Copyright
Copyright © Microscopy Society of America 2020

References

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Belianinov, A. et al. , Nat. Commun. 67801 (2015).Google Scholar