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Development of Automatic TEM/SEM Specimen Preparation Instrument for Nanomaterial Dispersed in Liquid

Published online by Cambridge University Press:  05 August 2019

Satoru Akai ,
Kazuhiro Kumagai ,
Nobuo Handa ,
Akira Kurokawa ,
Yoshikazu Sasaki ,
Naoki Kikuchi ,
Shin-ichi Kitamura  and
Hironobu Manabe
Satoru Akai*
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, Japan.
Kazuhiro Kumagai
Affiliation:
National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki, Japan.
Nobuo Handa
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, Japan.
Akira Kurokawa
Affiliation:
National Institute of Advanced Industrial Science and Technology, Tsukuba, Ibaraki, Japan.
Yoshikazu Sasaki
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, Japan.
Naoki Kikuchi
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, Japan.
Shin-ichi Kitamura
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, Japan.
Hironobu Manabe
Affiliation:
JEOL Ltd., 3-1-2 Musashino, Akishima, Tokyo, Japan.
*
*Corresponding author: saakai@jeol.co.jp

Abstract

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Type
Microscopy and Microanalysis for Real-World Problem Solving
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 774 - 775
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Kumagai, K. et al. , 18th Int. Micro. Cong. Proceedings ID-5-P-1832 (2014), p. 3973.Google Scholar
[2]This research was supported by the “Bridging R&D and Business Promotion for Small and Medium-Sized Enterprises Project” in New Energy and Industrial Technology Development Organization (NEDO), Japan.Google Scholar