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Development of an Aberration Corrected 1.2-MV Field Emission Transmission Electron Microscope

Published online by Cambridge University Press:  23 September 2015

Hiroyuki Shinada
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan
Toshiaki Tanigaki
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan
Tetsuya Akashi
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan
Yoshio Takahashi
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan
Tadao Furutsu
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan
Tomokazu Shimakura
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan
Takeshi Kawasaki
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan
Keigo Kasuya
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan
Heiko Muller
Affiliation:
Corrected Electron Optical Systems GmbH, Englerstr. 28, D-69126, Heidelberg, Germany
Maximilian Haider
Affiliation:
Corrected Electron Optical Systems GmbH, Englerstr. 28, D-69126, Heidelberg, Germany
Nobuyuki Osakabe
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan
Akira Tonomura
Affiliation:
Central Research Laboratory, Hitachi, Ltd., Hatoyama 350-0395, Japan RIKEN Center for Emergent Matter Science (CEMS), Wako 351-0198, Japan

Abstract

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Type
Abstract
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Tonomura, A., et al, Jpn. J. Appl. Phys 18, 9 (1979).CrossRefGoogle Scholar
[2] Sepehri-Amin, H., et al, Acta Mater 61, 6622 (2013).CrossRefGoogle Scholar
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[5] This research was supported by a grant from the Japan Society for the Promotion of Science (JSPS) through the Funding Program for World-Leading Innovative R&D on Science and Technology (FIRST Program),’ initiated by the Council for Science and Technology Policy (CSTP).Google Scholar