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Development of a Reference Material for Image Sharpness Evaluation in Scanning Electron Microscopy

Published online by Cambridge University Press:  25 July 2016

Kazuhiro Kumahai  and
Akira Kurokawa
Kazuhiro Kumahai
Affiliation:
Surface and Nano Analysis Research Group, Research Institute for Material and Chemical Measurement, National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan
Akira Kurokawa
Affiliation:
Surface and Nano Analysis Research Group, Research Institute for Material and Chemical Measurement, National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (AIST), Tsukuba, Japan

Abstract

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Abstract
Information
Microscopy and Microanalysis , Volume 22 , Supplement S3: Proceedings of Microscopy & Microanalysis 2016 , July 2016 , pp. 448 - 449
Copyright
© Microscopy Society of America 2016 

References

[1] ISO/TS 24597 (2011). Microbeam analysis—Scanning electron microscopy — Methods of evaluating image sharpness (2011).Google Scholar
[2] Matthews, M & Shah, J Microsc. Microanal 21 (2015). p. 2239.CrossRefGoogle Scholar
[3] A part of this study was conducted as one of the activities in Japan Industrial Technology Association supported by JKA Foundation (FY2015).Google Scholar