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Development of a Double Tilt Specimen Heating Holder and its Application for the Study of Phase Transformation of Si3N4 During Sintering

Published online by Cambridge University Press:  02 July 2020

T. Kamino ,
T. Yaguchi ,
M. Tomita ,
Y. Yasutomi  and
K. Hidaka
T. Kamino
Affiliation:
Hitachi Instruments Engineering Co., Ltd., 882 Ichige, Hitachi-naka, Ibaraki, 312Japan
T. Yaguchi
Affiliation:
Hitachi Instruments Engineering Co., Ltd., 882 Ichige, Hitachi-naka, Ibaraki, 312Japan
M. Tomita
Affiliation:
Instrument Division, Hitachi Ltd., 882 Ichige, Hitachi-naka, Ibaraki, 312Japan
Y. Yasutomi
Affiliation:
Hitachi Research Laboratory, Hitachi Ltd., 3-1-1 Saiwai-cho, Hitachi, Ibaraki, 317Japan
K. Hidaka
Affiliation:
Hitachi Research Laboratory, Hitachi Ltd., 3-1-1 Saiwai-cho, Hitachi, Ibaraki, 317Japan
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Extract

The results of our previous studies revealed that the specimen heating holder with the heating elements of spiral shaped fine metal wires of high melting point enable us to observe high resolution transmission electron microscopy(TEM) images at elevated temperatures.

In fact, the holder was applied for high resolution TEM study of a formation of SiC crystal at 1500°C and a surface reconstruction of Au deposited Si particle at 1000°C successfully. However, because the heating holder was single tilt type, there was a certain limitation in its application.

In this paper, development of a double tilt specimen heating holder with a heating element of spiral shaped fine metal wire and its application for the study of microstructural changes of Si3N4 during sintering at very high temperature.

Photograph of the newly developed double tilt specimen heating holder is shown in Fig. 1. The heating element is mounted on the electrically isolated tilting frame of the holder and the heating current is supplied via tilting rod which is also electrically isolated from other parts of the holder.

Type
Advances in Instrumentation for Microanalysis and Imaging
Information
Microscopy and Microanalysis , Volume 3 , Issue S2: Proceedings: Microscopy & Microanalysis '97, Microscopy Society of America 55th Annual Meeting, Microbeam Analysis Society 31st Annual Meeting, Histochemical Society 48th Annual Meeting, Cleveland, Ohio, August 10-14, 1997 , August 1997 , pp. 1085 - 1086
Copyright
Copyright © Microscopy Society of America 1997

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References

1.Kamino, T. and Saka, H., Microscopy Microanalysis Microstructure 4 (1993) 110.1051/mmm:0199300402-3012700CrossRefGoogle Scholar
2.Kamino, T., Yaguchi, T. and Saka, H.J. Electron Micros. 43 (1994) 104Google Scholar
3.Kamino, T., et al., Materials Transaction, JIM, 36,(1995) 7310.2320/matertrans1989.36.73CrossRefGoogle Scholar