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Development of a 1MV-Field-Emission Electron Microscope I. Instrument

Published online by Cambridge University Press:  02 July 2020

I. Matsui ,
T. Katsuta ,
T. Kawasaki ,
S. Hayashi ,
T. Furutsu ,
T. Onai ,
K. Myochin ,
T. Yoshida ,
T. Matsuda  and
S. Kubota
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I. Matsui
Affiliation:
Instruments, Hitachi, Ltd., 882 Ichige, Hitachi-naka, 312-0033, Japan CREST, Japan Science and Technology Corporation (JST)
T. Katsuta
Affiliation:
Instruments, Hitachi, Ltd., 882 Ichige, Hitachi-naka, 312-0033, Japan
T. Kawasaki
Affiliation:
Advanced Research Laboratory, Hitachi, Ltd., Hatoyama, Saitama350-0395, Japan CREST, Japan Science and Technology Corporation (JST)
S. Hayashi
Affiliation:
Instruments, Hitachi, Ltd., 882 Ichige, Hitachi-naka, 312-0033, Japan
T. Furutsu
Affiliation:
Instruments, Hitachi, Ltd., 882 Ichige, Hitachi-naka, 312-0033, Japan
T. Onai
Affiliation:
Instruments, Hitachi, Ltd., 882 Ichige, Hitachi-naka, 312-0033, Japan
K. Myochin
Affiliation:
Instruments, Hitachi, Ltd., 882 Ichige, Hitachi-naka, 312-0033, Japan
T. Yoshida
Affiliation:
Advanced Research Laboratory, Hitachi, Ltd., Hatoyama, Saitama350-0395, Japan CREST, Japan Science and Technology Corporation (JST)
T. Matsuda
Affiliation:
Advanced Research Laboratory, Hitachi, Ltd., Hatoyama, Saitama350-0395, Japan CREST, Japan Science and Technology Corporation (JST)
S. Kubota
Affiliation:
Advanced Research Laboratory, Hitachi, Ltd., Hatoyama, Saitama350-0395, Japan
J. Endo
Affiliation:
Advanced Research Laboratory, Hitachi, Ltd., Hatoyama, Saitama350-0395, Japan
N. Osakabe
Affiliation:
Advanced Research Laboratory, Hitachi, Ltd., Hatoyama, Saitama350-0395, Japan CREST, Japan Science and Technology Corporation (JST)
A. Tonomura
Affiliation:
Advanced Research Laboratory, Hitachi, Ltd., Hatoyama, Saitama350-0395, Japan CREST, Japan Science and Technology Corporation (JST)
K . Kitazawa
Affiliation:
Department of Applied Chemistry, University of Tokyo, Tokyo, 113-8656, Japan CREST, Japan Science and Technology Corporation (JST)
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We have developed 100-kV, 200-kV, and 350-kV cold-field-emission transmission electron microscopes (FE-TEMs) successively up to this time. Using these instruments, we have been studying the magnetic structure of materials, high-resolution imaging by electron holography, and dynamic observation of the vortex in superconductors by Lorentz microscopy. To make more progress in our research, we need a better electron beam in terms of coherency, beam brightness, and penetration. Here, we report a new lMV-cold-field-emission transmission electron microscope we have developed. Historically, the pioneering projects on a lMV-field-emission scanning transmission electron microscope (FE-STEM) (Zeitler and Crewe, 1974) and a 1.6MV FE-STEM (Jouffrey et al., 1984) have been reported. In 1988, Maruse and Shimoyama obtained a lMV-field-emission beam using their 1.25MV-STEM connected to a field-emission gun. Since then, continuous improvements in beam brightness has been made.

The target specifications of our 1 MV-cold-field-emission TEM (H-1000FT) are as follows: Acceleration voltage: 1MV, high-voltage stability :

Type
Instrument Performance
Information
Microscopy and Microanalysis , Volume 6 , Issue S2: Proceedings: Microscopy & Microanalysis 2000, Microscopy Society of America 58th Annual Meeting, Microbeam Analysis Society 34th Annual Meeting, Microscopical Society of Canada/Societe de Microscopie de Canada 27th Annual Meeting, Philadelphia, Pennsylvania August 13-17, 2000 , August 2000 , pp. 1138 - 1139
Copyright
Copyright © Microscopy Society of America

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References

References:

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