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Design of a Two-Stage Gas Amplification Secondary Electron Detector for Imaging Insulating Samples at the sub-1 nm Scale

Published online by Cambridge University Press:  01 August 2004

W. Ralph Knowles
Affiliation:
FEI Company, Hillsboro, Oregon
B L Thiel
Affiliation:
State University of New York Albany
Milos Toth
Affiliation:
FEI Company, Hillsboro, Oregon
R P M Schroemges
Affiliation:
FEI Company, Hillsboro, Oregon
J J Scholtz
Affiliation:
FEI Company, Hillsboro, Oregon
Gerard van Veen
Affiliation:
FEI Company, Hillsboro, Oregon
Marcel Elders
Affiliation:
FEI Company, Hillsboro, Oregon
A M Donald
Affiliation:
University of Cambridge, United Kingdom
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Extract

Extended abstract of a paper presented at Microscopy and Microanalysis 2004 in Savannah, Georgia, USA, August 1–5, 2004.

Type
Research Article
Copyright
© 2004 Microscopy Society of America

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