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Design, Construction and Applications of a Low Temperature (5 K) Combined Scanning Cathodoluminescence and WDS X-ray Spectroscopy and Imaging System

Published online by Cambridge University Press:  02 July 2020

M.R. Phillips ,
A. R. Moon ,
M. A. Stevens Kalceff  and
G. Remond
M.R. Phillips
Affiliation:
Microstructural Analysis Unit, University of Technology, Sydney, P.O. Box 123, NSW, Australia 2007
A. R. Moon
Affiliation:
Microstructural Analysis Unit, University of Technology, Sydney, P.O. Box 123, NSW, Australia 2007
M. A. Stevens Kalceff
Affiliation:
Microstructural Analysis Unit, University of Technology, Sydney, P.O. Box 123, NSW, Australia 2007
G. Remond
Affiliation:
Present Address: Australian Key Center for Microscopy and Microanalysis, University of Sydney, NSW, Australia, 2006matthew.phillips@uts.edu.au
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Extract

Recently there has been a renaissance in scanning cathodoluminescence (CL) microscopy and microanalysis primarily brought about by the analytical demands of the semiconductor industry in addition to significant advances in photonics technology (high efficiency PMTs, CCDs and CL collectors). The strength of the CL analysis technique lies in its ability to provide high spatial (lateral and depth) resolution concentration and distribution information about: (i) the chemical state (identity, oxidation state and co-ordination) of trace level impurities and (ii) point / extended structural defects (vacancies and dislocations) in both semiconductors and insulators.

For many materials, interpretation of CL spectra and images measured at low temperature (5 K) is quite straightforward. However CL generation via recombination of electron / hole pairs is a competitive process. Consequently in some specimens the measured CL intensity is not directly proportional to the concentration of the particular luminescent center but relates to the concentration of other radiative or non-radiative centers. In these cases it is difficult to decide whether contrast in the CL image is due to variation in the concentration of the radiative center or the competitive center.

Type
Advances in Instrumentation for Microanalysis and Imaging
Information
Microscopy and Microanalysis , Volume 3 , Issue S2: Proceedings: Microscopy & Microanalysis '97, Microscopy Society of America 55th Annual Meeting, Microbeam Analysis Society 31st Annual Meeting, Histochemical Society 48th Annual Meeting, Cleveland, Ohio, August 10-14, 1997 , August 1997 , pp. 1069 - 1070
Copyright
Copyright © Microscopy Society of America 1997

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References

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