Design and performance of a Near Ultra High Vacuum Helium Ion Microscope

R van Gastel; L Barriss; C Sanford; G Hlawacek; L Scipioni; A Merkle; D Voci; C Fenner; H Zandvliet; B Poelsema

doi:10.1017/S1431927611005514

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Extended abstract of a paper presented at Microscopy and Microanalysis 2011 in Nashville, Tennessee, USA, August 7–August 11, 2011.

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Hlawacek, Gregor Veligura, Vasilisa Lorbek, Stefan Mocking, Tijs F George, Antony van Gastel, Raoul Zandvliet, Harold J W and Poelsema, Bene 2012. Imaging ultra thin layers with helium ion microscopy: Utilizing the channeling contrast mechanism. Beilstein Journal of Nanotechnology, Vol. 3, Issue. , p. 507.

Mocking, T.F. Hlawacek, G. and Zandvliet, H.J.W. 2012. Cobalt induced nanocrystals on Ge(001). Surface Science, Vol. 606, Issue. 11-12, p. 924.

Veligura, Vasilisa Hlawacek, Gregor van Gastel, Raoul Zandvliet, Harold J W and Poelsema, Bene 2012. Channeling in helium ion microscopy: Mapping of crystal orientation. Beilstein Journal of Nanotechnology, Vol. 3, Issue. , p. 501.

Hlawacek, Gregor Ahmad, Imtiaz Smithers, Mark A. and Kooij, E. Stefan 2013. To see or not to see: Imaging surfactant coated nano-particles using HIM and SEM. Ultramicroscopy, Vol. 135, Issue. , p. 89.

Veligura, Vasilisa Hlawacek, Gregor Berkelaar, Robin P van Gastel, Raoul Zandvliet, Harold J W and Poelsema, Bene 2013. Digging gold: keV He+ ion interaction with Au. Beilstein Journal of Nanotechnology, Vol. 4, Issue. , p. 453.

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Veligura, Vasilisa Hlawacek, Gregor Jahn, Uwe van Gastel, Raoul Zandvliet, Harold J. W. and Poelsema, Bene 2014. Creation and physical aspects of luminescent patterns using helium ion microscopy. Journal of Applied Physics, Vol. 115, Issue. 18,

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Veligura, Vasilisa Hlawacek, Gregor van Gastel, Raoul Zandvliet, Harold J.W. and Poelsema, Bene 2015. Investigation of ionoluminescence of semiconductor materials using helium ion microscopy. Journal of Luminescence, Vol. 157, Issue. , p. 321.

Hlawacek, Gregor Jankowski, Maciej Wormeester, Herbert van Gastel, Raoul Zandvliet, Harold J.W. and Poelsema, Bene 2016. Visualization of steps and surface reconstructions in Helium Ion Microscopy with atomic precision. Ultramicroscopy, Vol. 162, Issue. , p. 17.

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Frese, Natalie Schmerer, Patrick Wortmann, Martin Schürmann, Matthias König, Matthias Westphal, Michael Weber, Friedemann Sudhoff, Holger and Gölzhäuser, Armin 2021. Imaging of SARS-CoV-2 infected Vero E6 cells by helium ion microscopy. Beilstein Journal of Nanotechnology, Vol. 12, Issue. , p. 172.

Höflich, Katja Hobler, Gerhard Allen, Frances I. Wirtz, Tom Rius, Gemma McElwee-White, Lisa Krasheninnikov, Arkady V. Schmidt, Matthias Utke, Ivo Klingner, Nico Osenberg, Markus Córdoba, Rosa Djurabekova, Flyura Manke, Ingo Moll, Philip Manoccio, Mariachiara De Teresa, José María Bischoff, Lothar Michler, Johann De Castro, Olivier Delobbe, Anne Dunne, Peter Dobrovolskiy, Oleksandr V. Frese, Natalie Gölzhäuser, Armin Mazarov, Paul Koelle, Dieter Möller, Wolfhard Pérez-Murano, Francesc Philipp, Patrick Vollnhals, Florian and Hlawacek, Gregor 2023. Roadmap for focused ion beam technologies. Applied Physics Reviews, Vol. 10, Issue. 4,

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Design and performance of a Near Ultra High Vacuum Helium Ion Microscope

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