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Deep-Learning Based Autofocus Score Prediction of Scanning Electron Microscope

Published online by Cambridge University Press:  05 August 2019

Huisoo Kim
Affiliation:
Egovid Inc., UNIST-gil 50, Ulsan 44919, Korea.
Moohyun Oh
Affiliation:
Egovid Inc., UNIST-gil 50, Ulsan 44919, Korea.
Heerang Lee
Affiliation:
Egovid Inc., UNIST-gil 50, Ulsan 44919, Korea.
Jonggyu Jang
Affiliation:
Ulsan National Institute of Science and Technology, UNIST-gil 50, Ulsan 44919, Korea.
Myeung Un Kim
Affiliation:
Ulsan National Institute of Science and Technology, UNIST-gil 50, Ulsan 44919, Korea.
Hyun Jong Yang
Affiliation:
Egovid Inc., UNIST-gil 50, Ulsan 44919, Korea. Ulsan National Institute of Science and Technology, UNIST-gil 50, Ulsan 44919, Korea.
Michael Ryoo
Affiliation:
Egovid Inc., UNIST-gil 50, Ulsan 44919, Korea.
Junhee Lee
Affiliation:
Coxem Co. Ltd, Techno 2-ro 199, Yuseong-gu, Daejeon 34025, Korea.
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Abstract

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Type
Data Acquisition Schemes, Machine Learning Algorithms, and Open Source Software Development for Electron Microscopy
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Santos, A. et al. , Journal of Microscopy 188 (1997) p. 264-272.CrossRefGoogle Scholar
[2]Yao, Y. et al. , SPIE (2006) p. 1-12.Google Scholar
[3]Simonyan, K. and Zisserman, A., ICLR (2015) p. 1-14.Google Scholar
[4]He, K. et al. , IEEE CVPR (2016) p. 770-778.Google Scholar
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