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Decomposition Behavior of III/V Semiconductor Precursor Gases in In-situ TEM MOVPE Investigations Observed by Mass Spectrometry

Published online by Cambridge University Press:  30 July 2020

Maximilian Widemann ,
David Krug ,
Felix Gruber ,
Andreas Beyer  and
Kerstin Volz
Maximilian Widemann
Affiliation:
Faculty of Physics and Materials Sciences Center, Philipps-Universität Marburg, Marburg, Hessen, Germany
David Krug
Affiliation:
Faculty of Physics and Materials Sciences Center, Philipps-Universität Marburg, Marburg, Hessen, Germany
Felix Gruber
Affiliation:
Faculty of Physics and Materials Sciences Center, Philipps-Universität Marburg, Marburg, Hessen, Germany
Andreas Beyer
Affiliation:
Faculty of Physics and Materials Sciences Center, Philipps-Universität Marburg, Marburg, Hessen, Germany
Kerstin Volz
Affiliation:
Faculty of Physics and Materials Sciences Center, Philipps-Universität Marburg, Marburg, Hessen, Germany

Abstract

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Type
In Situ TEM at the Extremes
Information
Microscopy and Microanalysis , Volume 26 , Supplement S2 , August 2020 , pp. 2408 - 2409
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Copyright
Copyright © Microscopy Society of America 2020

References

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