Quantitative CBED techniques are now capable of making low-order structure factor measure-ments with sufficient accuracy to study bonding effects in crystalline materials. The main limitation of these techniques has been identified as the accuracy with which one knows the Debye-Waller factor(s) (DWF(s)). Even where X-ray measurements exist, values have usually been determined at room temperature whereas we often want to perform our electron diffraction experiments at liquid nitrogen temperatures to reduce the effects of thermal diffuse scattering (TDS). Attempts to calculate theoretical DWF values have been shown to have limited accuracy when compared to experimental measurements.

This has led to a search for new electron diffraction methods for DWF determination such as the use of HOLZ line segments, high-index systematic rows and electron precession patterns. The aim should be to measure the DWF(s) under identical conditions to those used for the charge density studies, e.g. the same sample thickness, temperature and microscope settings.