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Crystallization Processes of Amorphous GeSn Thin Films by Heat Treatment and Electron Beam Irradiation

Published online by Cambridge University Press:  04 August 2017

T. Kimura ,
M. Ishimaru ,
M. Okugawa ,
R. Nakamura  and
H. Yasuda
T. Kimura
Affiliation:
Department of Materials Science and Engineering, Kyushu Institute of Technology, Kitakyushu, Fukuoka 804-8550, Japan
M. Ishimaru
Affiliation:
Department of Materials Science and Engineering, Kyushu Institute of Technology, Kitakyushu, Fukuoka 804-8550, Japan
M. Okugawa
Affiliation:
Department of Materials Science, Osaka Prefecture University, Sakai, Osaka 599-8531, Japan
R. Nakamura
Affiliation:
Department of Materials Science, Osaka Prefecture University, Sakai, Osaka 599-8531, Japan
H. Yasuda
Affiliation:
Research Center for Ultra-High Voltage Electron Microscopy, Osaka University, Ibaraki, Osaka 567-0047, Japan

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 23 , Supplement S1: Proceedings of Microscopy & Microanalysis 2017 , July 2017 , pp. 2046 - 2047
Copyright
© Microscopy Society of America 2017 

References

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