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Contrast and spatial resolution enhancement with the transmission mode in SEM

Published online by Cambridge University Press:  30 July 2021

Ute Golla-Schindler ,
Bernd Schindler  and
Gerhard Schneider
Ute Golla-Schindler
Affiliation:
Materials Research Institute (IMFAA), Aalen University, Aalen, Germany, Aalen, Germany
Bernd Schindler
Affiliation:
Carl Zeiss Microscopy, Oberkochen, Germany, United States
Gerhard Schneider
Affiliation:
Materials Research Institute (IMFAA), Aalen University, Aalen, Germany, Aalen, Germany

Abstract

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Type
Advances in Analytical STEM-in-SEM
Information
Microscopy and Microanalysis , Volume 27 , Supplement S1 , August 2021 , pp. 1820 - 1822
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Copyright
Copyright © The Author(s), 2021. Published by Cambridge University Press on behalf of the Microscopy Society of America

References

Golla, U., Schindler, B. and Reimer, L. Journal of Microscopy 173 (1994)CrossRefGoogle Scholar
Golla, U. master thesis (1993)Google Scholar
Golla-Schindler, U. (2004) STEM-Unit measurements in a scanning electron microscope. Proceedings of the 13th European Microscopy Congress. Antwerpen Vol. I 409-410Google Scholar