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Computational Method for Composition Determination of Multilayer Epitaxial Semiconductor Structures Using Standards-Based Energy-Dispersive X-Ray Spectrometry

Published online by Cambridge University Press:  23 September 2015

Monika Rathi ,
Nan Zheng  and
Phil Ahrenkiel
Monika Rathi
Affiliation:
University of Houston, Mechanical Engineering, Houston, TX, U.S.A.
Nan Zheng
Affiliation:
South Dakota School of Mines & Technology, Nanoscience & Nanoengineering, Rapid City, SD, U.S.A.
Phil Ahrenkiel
Affiliation:
South Dakota School of Mines & Technology, Nanoscience & Nanoengineering, Rapid City, SD, U.S.A.

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 1085 - 1086
Copyright
Copyright © Microscopy Society of America 2015 

References

References:

[1] Watanabe, M & Williams, D B , J Microscopy 221, p. 89.Google Scholar

Further reading

[2] Rathi, M, et al, Microsc Microanal. 19 (2013). p. 66.Google Scholar
[3] Spence, J C H & Zuo, J M, Electron Microdiffraction. Plenum, New York p. 68.Google Scholar