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Compositional Mapping with Energy Filtering TEM: The Present Status

Published online by Cambridge University Press:  02 July 2020

Ferdinand Hofer ,
Gerald Kothleitner  and
Peter Warbichler
Ferdinand Hofer
Affiliation:
Research Institute for Electron Microscopy, Graz University of Technology, A-8010, Graz, Austria
Gerald Kothleitner
Affiliation:
Research Institute for Electron Microscopy, Graz University of Technology, A-8010, Graz, Austria
Peter Warbichler
Affiliation:
Research Institute for Electron Microscopy, Graz University of Technology, A-8010, Graz, Austria
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Abstract

Energy filtering transmission electron microscopy (EFTEM) has matured into an important nanoanalytical technique in both materials and life sciences. One of the technique′s main advantages stems from the possibility to quickly form images that contain two-dimensional elemental information for most elements (Li to Pu) from relatively large specimen areas with nanometer resolution. Over the last years numerous and wide-ranging applications have demonstrated its almost unrivalled power for assessing typical materials science questions.

Both in-column or post-column filter microscopes have reached a high performance level, but future improvements are still desirable, in particular with respect to increased transmissivity, improved isochromaticity and higher detection efficiency. Current instruments allow to acquire elemental maps with 1-5 nm spatial resolution limited mainly by the aberrations of the microscope and by the quality of the specimen. As recently shown 0.4 nm resolution is feasible.

One major practical problem of EFTEM compositional mapping is the poor signal-to-noise ratio, which means that experimental parameters have to be chosen very carefully in order to optimize this ratio.

Type
EELS Microanalysis At High Sensitivity: Advances in Spectrum Imaging, Energy Filtering and Detection (Organized by R. Leapman and J. Bruley)
Information
Microscopy and Microanalysis , Volume 7 , Issue S2: Proceedings: Microscopy & Microanalysis 2001, Microscopy Society of America 59th Annual Meeting, Microbeam Analysis Society 35th Annual Meeting, Long Beach, California August 5-9, 2001 , August 2001 , pp. 1136 - 1137
Copyright
Copyright © Microscopy Society of America 2001

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