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A Comparison of a Luminescence-based VPSE and an Electron-based GSED for SE and CL Imaging in Variable Pressure SEM with Conventional SE imaging

Published online by Cambridge University Press:  01 August 2010

BJ Griffin
Affiliation:
The University of Western Australia, Australia
JR Michael
Affiliation:
Sandia National Laboratories
DC Joy
Affiliation:
Oak Ridge National Laboratory

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Copyright
Copyright © Microscopy Society of America 2010