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A Comparative Analysis of a Si/SiGe Heterojunction-Bipolar Transistors: APT, STEM-EDX and ToF-SIMS

Published online by Cambridge University Press:  23 September 2015

Robert Estivill ,
Pascal Chevalier ,
Frederic Lorut ,
Marc Juhel ,
Laurent Clement ,
Germain Servanton ,
Gregory Avenier ,
Adeline Grenier  and
Didier Blavette
Robert Estivill
Affiliation:
STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles, France .Univ. Grenoble Alpes, F-38000 Grenoble, France CEA, LETI, MINATEC Campus, F-38054 Grenoble, France .Groupe de Physique des Materiaux - GPM UMR CNRS 6634, Universite de Rouen, France
Pascal Chevalier
Affiliation:
STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles, France
Frederic Lorut
Affiliation:
STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles, France
Marc Juhel
Affiliation:
STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles, France
Laurent Clement
Affiliation:
STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles, France
Germain Servanton
Affiliation:
STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles, France
Gregory Avenier
Affiliation:
STMicroelectronics, 850 rue Jean Monnet, 38926 Crolles, France
Adeline Grenier
Affiliation:
.Univ. Grenoble Alpes, F-38000 Grenoble, France CEA, LETI, MINATEC Campus, F-38054 Grenoble, France
Didier Blavette
Affiliation:
.Groupe de Physique des Materiaux - GPM UMR CNRS 6634, Universite de Rouen, France

Abstract

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Type
Abstract
Information
Microscopy and Microanalysis , Volume 21 , Supplement S3: Proceedings of Microscopy & Microanalysis 2015 , August 2015 , pp. 689 - 690
Copyright
Copyright © Microscopy Society of America 2015 

References

[1] Blavette, D., Duguay, S. & Pareige, P., Int J Mater Res 102, 2011, 1074.CrossRefGoogle Scholar
[2] Yao, L., et al., Phil Mag Lett 93, 2013, 299.CrossRefGoogle Scholar
[3] Servanton, G. & Pantel, R., 41, 2010, 118.CrossRefGoogle Scholar
[4] This study has been performed at the nanocharacterisation platform (PFNC) of theMinatec Campus and ST Microelectonics, Crolles. The author would like to acknowledge a CIFRE (ANRT) scholarship.Google Scholar