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Characterization of Structural Change of Nano-crystalline ITO Films due to Exposure to Hyperthermal Atomic Oxygen

Published online by Cambridge University Press:  31 July 2006

L Li ,
R Harder ,
F Xu ,
IK Robinson  and
JC Yang
L Li
Affiliation:
University of Pittsburgh
R Harder
Affiliation:
University of Illinois at Urbana-Champaign
F Xu
Affiliation:
University of Pittsburgh
IK Robinson
Affiliation:
University of Illinois at Urbana-Champaign
JC Yang
Affiliation:
University of Pittsburgh

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2006 in Chicago, Illinois, USA, July 30 – August 3, 2006

Type
Abstract
Information
Microscopy and Microanalysis , Volume 12 , Issue S02 , August 2006 , pp. 644 - 645
Copyright
© 2006 Microscopy Society of America