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Channeling Contrast Simulation of Secondary Electron Images in Scanning Ion Microscopes

Published online by Cambridge University Press:  05 August 2019

Kaoru Ohya
Kaoru Ohya*
Affiliation:
Professor Emeritus of Tokushima University, Tokushima, Japan.

Abstract

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Type
Advances in Focused Ion Beam Instrumentation and Techniques
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 924 - 925
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Ohya, K, AIP Advances 8 (2018), p. 015120.Google Scholar
[2]Ramachandra, R, Grifin, B and Joy, D, Ultramicroscopy 109 (2009), p. 748.Google Scholar
[3]Hlawacek, G et al. in “Helium Ion Microscopy”, (Springer, Switzerland) p. 205.Google Scholar