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Challenges and Opportunities for Focused Ion Beam Processing at the Nano-scale

Published online by Cambridge University Press:  26 July 2009

J Gierak ,
B Schiedt ,
D Lucot ,
A Madouri ,
E Bourhis ,
G Patriarche ,
C Ulysse ,
X Lafosse ,
L Auvray  and
L Bruchhaus
...Show all authors
J Gierak
Affiliation:
LPN/CNRS,France
B Schiedt
Affiliation:
LPN/CNRS,France
D Lucot
Affiliation:
LPN/CNRS,France
A Madouri
Affiliation:
LPN/CNRS,France
E Bourhis
Affiliation:
LPN/CNRS,France
G Patriarche
Affiliation:
LPN/CNRS,France
C Ulysse
Affiliation:
LPN/CNRS,France
X Lafosse
Affiliation:
LPN/CNRS,France
L Auvray
Affiliation:
Université dÉvry,France
L Bruchhaus
Affiliation:
RAITH GmbH,Germany
R Jede
Affiliation:
RAITH GmbH,Germany

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2009 in Richmond, Virginia, USA, July 26 – July 30, 2009

Type
Abstract
Information
Microscopy and Microanalysis , Volume 15 , Supplement S2 , July 2009 , pp. 320 - 321
Copyright
Copyright © Microscopy Society of America 2009