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Calibration of Piezoelectric Positioning Actuators Using a Reference Voltage-to-Displacement Transducer Based on Quartz Tuning Forks

Published online by Cambridge University Press:  21 March 2012

Andres Castellanos-Gomez ,
Carlos R. Arroyo ,
Nicolás Agraït  and
Gabino Rubio-Bollinger
Andres Castellanos-Gomez
Affiliation:
Departamento de Física de la Materia Condensada (C–III). Universidad Autónoma de Madrid, Campus de Cantoblanco, 28049 Madrid, Spain
Carlos R. Arroyo
Affiliation:
Departamento de Física de la Materia Condensada (C–III). Universidad Autónoma de Madrid, Campus de Cantoblanco, 28049 Madrid, Spain
Nicolás Agraït
Affiliation:
Departamento de Física de la Materia Condensada (C–III). Universidad Autónoma de Madrid, Campus de Cantoblanco, 28049 Madrid, Spain Instituto Universitario de Ciencia de Materiales “Nicolás Cabrera”, Universidad Autónoma de Madrid, Campus de Cantoblanco, 28049 Madrid, Spain Instituto Madrileño de Estudios Avanzados en Nanociencia, IMDEA-Nanociencia, 28049 Madrid, Spain
Gabino Rubio-Bollinger*
Affiliation:
Departamento de Física de la Materia Condensada (C–III). Universidad Autónoma de Madrid, Campus de Cantoblanco, 28049 Madrid, Spain Instituto Universitario de Ciencia de Materiales “Nicolás Cabrera”, Universidad Autónoma de Madrid, Campus de Cantoblanco, 28049 Madrid, Spain
*
Corresponding author. E-mail: gabino.rubio@uam.es
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Abstract

We use a piezoelectric quartz tuning fork to calibrate the displacement of ceramic piezoelectric scanners that are widely employed in scanning probe microscopy. We measure the static piezoelectric response of a quartz tuning fork and find it to be highly linear, nonhysteretic and with negligible creep. These performance characteristics, close to those of an ideal transducer, make quartz transducers superior to ceramic piezoelectric actuators. Furthermore, quartz actuators in the form of a tuning fork have the advantage of yielding static displacements comparable to those of local probe microscope scanners. We use the static displacement of a quartz tuning fork as a reference to calibrate the three axis displacement of a ceramic piezoelectric scanner. Although this calibration technique is a nontraceable method, it can be more versatile than using calibration grids because it enables characterization of the linear and nonlinear response of a piezoelectric scanner in a broad range of displacements, spanning from a fraction of a nanometer to hundreds of nanometers. In addition, the creep and the speed dependent piezoelectric response of ceramic scanners can be studied in detail.

Keywords

scanning probe microscopyatomic force microscopyscanning tunneling microscopyforce sensorspiezoelectricityquartz tuning forkmicroscopescalibration standardspiezoelectric materials
Type
Techniques and Software Development
Information
Microscopy and Microanalysis , Volume 18 , Issue 2 , April 2012 , pp. 353 - 358
Copyright
Copyright © Microscopy Society of America 2012

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