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A BKM to Measure BEOL Liner Thickness from XEDS Mapping with Accuracy Within 1%

Published online by Cambridge University Press:  05 August 2019

Wayne W. Zhao
Wayne W. Zhao*
Affiliation:
Physical Failure Analysis, Center for Complex Analysis, Characterization Group, Fab8, GLOBALFOUNDRIES, Malta, New York, USA.
*
*Corresponding author: wayne.zhao@globalfoundries.com

Abstract

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Type
Microscopy and Microanalysis for Real-World Problem Solving
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 772 - 773
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Zhao, W and Gribelyuk, M, Microscopy & Microanalysis 24(S1) (2018), p.1998.Google Scholar
[2]Zhao, W et al. , Microscopy & Microanalysis 23(S1) (2017), p.336.Google Scholar
[3]Zhao, W and Wang, Y, Microscopy & Microanalysis 23(S1) (2017), p.1490.Google Scholar
[4]Fu, B et al. , Microscopy & Microanalysis 23(S1) (2017), p.1456.Google Scholar
[5]Zhao, W and Gribelyuk, M, Microscopy & Microanalysis 22(S3) (2016), p.1532.Google Scholar
[6]Zhao, W et al. , Microscopy & Microanalysis 20(S3) (2014), p.362.Google Scholar
[7]Thanks go to Albert Amann III of GLOBALFOUNDRIES Fab8 for his skillfulness in TEM sample-preparations, and Fab8 Management and Legal teams for supporting the publication clearance.Google Scholar