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Avoiding FIB damage using the “umbrella” method

Published online by Cambridge University Press:  05 August 2019

C.C. Tasan ,
T. Vermeij  and
E. Plancher
C.C. Tasan*
Affiliation:
Massachusetts Institute of Technology, Department of Materials Science and Engineering, 77 Massachusetts Avenue, Cambridge, MA 02139, USA
T. Vermeij
Affiliation:
Massachusetts Institute of Technology, Department of Materials Science and Engineering, 77 Massachusetts Avenue, Cambridge, MA 02139, USA Eindhoven University of Technology, Department of Mechanical Engineering, Den Dolech 2, 5612 AZ Eindhoven, The Netherlands
E. Plancher
Affiliation:
Massachusetts Institute of Technology, Department of Materials Science and Engineering, 77 Massachusetts Avenue, Cambridge, MA 02139, USA
*
*Corresponding author: tasan@mit.edu

Abstract

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Type
Advances in Focused Ion Beam Instrumentation and Techniques
Information
Microscopy and Microanalysis , Volume 25 , Supplement S2 , August 2019 , pp. 850 - 851
Copyright
Copyright © Microscopy Society of America 2019 

References

[1]Vermeij, T., Plancher, E., Tasan, C.C., Ultramicroscopy 186 (2018) p 35.Google Scholar