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Automated XPS Analysis of Passivated Stainless Steel to the SEMI Standard

Published online by Cambridge University Press:  01 August 2010

RG White ,
TS Nunney ,
BR Strohmeier ,
JD Piasecki  and
RJ Lee
RG White
Affiliation:
Thermo Fisher Scientific, United Kingdom
TS Nunney
Affiliation:
Thermo Fisher Scientific, United Kingdom
BR Strohmeier
Affiliation:
RJ Lee Group, Inc
JD Piasecki
Affiliation:
RJ Lee Group, Inc
RJ Lee
Affiliation:
RJ Lee Group, Inc

Extract

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Extended abstract of a paper presented at Microscopy and Microanalysis 2010 in Portland, Oregon, USA, August 1 – August 5, 2010.

Type
Abstract
Information
Microscopy and Microanalysis , Volume 16 , Supplement S2 , July 2010 , pp. 436 - 437
Copyright
Copyright © Microscopy Society of America 2010