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Atomistic Modeling of the Detailed Structure of Si/SiO2 Interfaces Using AIDATEM (Ab-initio Interface Defect detection by Analytic Transmission Electron Microscopy)

Published online by Cambridge University Press:  24 July 2003

W. Windl ,
T. Liang ,
S. Lopatin  and
G. Duscher
W. Windl
Affiliation:
Dept. of Materials Science and Engineering, The Ohio State University, Columbus, OH 43210
T. Liang
Affiliation:
Dept. of Materials Science and Engineering, The Ohio State University, Columbus, OH 43210
S. Lopatin
Affiliation:
Oak Ridge National Laboratory, Oak Ridge, TN 37831
G. Duscher
Affiliation:
Oak Ridge National Laboratory, Oak Ridge, TN 37831 Department of Materials Science and Engineering, NC State University, Raleigh, NC 27695

Abstract

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Information
Microscopy and Microanalysis , Volume 9 , Issue S02 , August 2003 , pp. 826 - 827
Copyright
Copyright © Microscopy Society of America 2003